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A cleaning technique to remove particles of several micro-meter diameter from a surface under dry environmental conditions is greatly needed in the manufacturing processes of LCDs. However, it is usually difficult to remove the fine particles by simple airflow because the particles adhere to the surface by strong forces. For this reason, a cleaning device equipped with a special nozzle is used in the actual industrial process. The nozzle has triangular cavities to add strong high-frequency fluctuations to the airflow. To clarify the effect of this fluctuation on particle removal quantitatively, we measured the airflow velocity, pressure fluctuation on a surface, and removal ratio for four types of nozzles: two varieties cavity nozzles and two straight nozzles with different lengths. The correlation between the intensity of pressure or velocity fluctuation and removal ratio for the cavity nozzles suggests that the turbulent fluctuation added by the cavity contributes to particle removing.

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International Journal of Flow Control

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