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Thickness Uniformity of Spin Coated Film Influenced by Nonuniform Temperature of Substrates
Taku OharaRelated information
1 Institute of Fluid Science, Tohoku University
, Shinichiro MatsubaraRelated information2 Mitsubishi Heavy Industries, Ltd.
, Hirotoshi KadowakiRelated information3 Graduate School of Engineering, Tohoku University
, Gota KikugawaRelated information1 Institute of Fluid Science, Tohoku University
, Kazuhiro TakeshitaRelated information4 Tokyo Electron Kyushu, Ltd.
, Tomoko HamadaRelated information4 Tokyo Electron Kyushu, Ltd.