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Alekseev, A., Baturin, S., Pavlov, G. and Shiryaev, A., Polymeric film formation in spin coating, Macromo. Symp., 2001, 169, 321-328.
CrossRef
Schwartz, L. W. and Roy, R. V., Theoretical and numerical results for spin coating of viscous liquids, Phys. Fluids, 2004, 16 (3), 569-584.
Emslie, A. G., Bonner, F. T. and Peck, L. G., Flow of a viscous liquid on a rotating disk, J. Appl. Phys., 1958, 29 (5), 858-862.
CrossRef
Higgins, B. G., Film flow on a rotating disk, Phys. Fluids, 1986, 29 (11), 3522-3529.
CrossRef
Rehg, T. J. and Higgins, B. G., The effects of inertia and interfacial shear on film flow on a rotating disk, Phys. Fluids, 1988, 31 (6), 1360-1371.
CrossRef
Sukanek, P. C., "Anomalous" speed dependence in polyimide spin coating, J. Electrochem. Soc., 1997, 144 (11), 3959-3963.
CrossRef
Acrivos, A., Shah, M. J. and Petersen, E. E., On the flow of a non-Newtonian liquid on a rotating disk, J. Appl. Phys., 1960, 31 (6), 963-968.
CrossRef
Jenekhe, S. A. and Schuldt, S. B., Coating flow of non-Newtonian fluids on a flat rotating disk, Ind. Eng. Chem. Fundam., 1984, 23 (4), 432-436.
CrossRef
Jenekhe, S. A. and Schuldt, S. B., Flow and film thickness of Bingham plastic liquids on a rotating disk, Chem. Eng. Commun., 1985, 33(1-4), 135-147.
CrossRef
Sukanek, P. C., Dependence of film thickness on speed in spin coating, J. Electrochem. Soc., 1991, 138 (6), 1712-1719.
CrossRef
Britten, J. A. and Thomas, I. M., Non-Newtonian flow effects during spin coating large-area optical coatings with colloidal suspensions, J. Appl. Phys., 1992, 71 (2), 972-979.
CrossRef
Burgess, S. L. and Wilson, S. D. R. Spin-coating of a viscoplastic material, Phys. Fluids, 1996, 8 (9), 2291-2297.
Meyerhofer, D., Characteristics of resist films produced by spinning, J. Appl. Phys., 1978, 49 (7), 3993-3997.
CrossRef
Jenekhe, S. A., Effects of solvent mass transfer on flow of polymer solutions on a flat rotating disk, Ind. Eng. Chem. Fundam., 1984, 23 (4), 425-432.
CrossRef
Sukanek, P. C., Spin coating, J. Imaging Technol., 1985, 11, 184-190.
Bornside, D. E., Macosko, C. W. and Scriven, L. E., Spin coating: one dimensional model, J. Appl. Phys., 1989, 66 (11), 5185-5193.
CrossRef
Bornside, D. E., Mechanism for the local planarization of microscopically rough surfaces by drying thin films of spin-coated polymer/solvent solutions, J. Electrochem. Soc., 1990, 137 (8), 2589-2595.
CrossRef
Lawrence, C. J., The mechanism of spin coating of polymer films, Phys. Fluids, 1988, 31 (10), 2786-2795.
CrossRef
Lawrence, C. J., Spin coating with slow evaporation, Phys. Fluids A, 1990, 2 (3), 453-456.
CrossRef
Yonkoski, R. K. and Soane, D. S., Model for spin coating in microelectronic applications, J. Appl. Phys., 1992, 72 (2), 725-740.
CrossRef
Ohara, T., Matsumoto, Y. and Ohashi, H., The film formation dynamics in spin coating, Phys. Fluids A, 1989, 1(12), 1949-1959.
CrossRef
Flack, W. W., Soong, D. S., Bell, A. T. and Hess, D. W., A mathematical model for spin coating of polymer resists, J. Appl. Phys., 1984, 56 (4), 1199-1206.
CrossRef
Birnie, D. P. III, Zelinski, B. J. J., Marvel, S. P., Melpolder, S. M. and Roncone, R. L., Film/substrate/vacuum-chuck interactions during spin coating, Optical Engineering, 1992, 31 (9), 2012-2020.
CrossRef
Birnie, D. P. III, Zelinski, B. J. J. and Perry, D. L., Infrared observation of evaporative cooling during spin-coating processes, Optical Engineering, 1995, 34 (6), 1782-1788.
CrossRef
Cobb, E. C. and Saunders, O. A., Heat transfer from a rotating disk, Proc. R. Soc. Lond. A, 1956, 236 (1206), 343-351.
CrossRef
Ohara, T., Ohashi, H. and Matsumoto, Y., Thin film formation on a rotating disk, Trans. JSME, Ser. B, 1991, 57 (543), 3807-3814. (in Japanese)
CrossRef
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International Journal of Emerging Multidisciplinary Fluid Sciences


International Journal of Emerging Multidisciplinary Fluid Sciences

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